Multi-Analysis Platform for Plasma Characterization and Surface Chemistry
The in-house developed Multi-Analysis Platform for Plasma Characterization and Surface Chemistry allows for multiple analytical methods to be performed simultaneously. The chamber contains a sample mount for sample exposure to various plasmas. An Inficon Transpector CPM is directly attached to the plasma chamber, providing mass spectral data and partial pressure measurements of mixed gases. The Transpector includes the HexBlock with allows for 15mTorr and 100mTorr sampling inlets. The platform itself was designed to allow in situ Raman analysis with the lab’s Horiba T64000. The most recent addition to the platform is Ocean Optics STS series of miniature spectrometers providing Visible and Near IR data. These spectrometers are fiber optically coupled to observe the plasma source itself. Vacuum is maintained by an oil free scroll pump.
Recent work with the platform has included characterization of soft-landed particles on various substrates, such as mica and silicon. For example, Raman analysis has clearly identified deposited hafnium oxides. Plasma characterization will include mass and emission spectra to fully characterize mixed gasses for surface chemistry modification.